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Extreme Ultraviolet (EUV) Spherical Mirrors

TECHSPEC® Extreme Ultraviolet (EUV) Spherical Mirrors

  • Mo/Si Multilayer Coating on Super-Polished Substrates
  • Maximum Achievable Reflection at 13.5nm
  • Designed for EUV Beam Focusing Applications
  • Narrow Pass Band for HHG Applications

Extreme Ultraviolet (EUV) Spherical Mirrors feature a multilayer Mo/Si coating providing greater than 60% reflection at 13.5nm. They are designed for a 5° angle of incidence and intended for focusing unpolarized EUV laser sources. A surface roughness of less than 3Å RMS minimizes scatter. This is essential for EUV wavelengths which experience more scattering than longer wavelengths. EUV Spherical Mirrors have a very narrow pass band of approximately 0.5nm, ensuring that only the 13.5nm harmonic of interest is reflected in high harmonic generation (HHG) applications. Typical applications for EUV spherical mirrors include Coherent Diffractive Imaging (CDI), EUV imaging, and EUV nanomachining.

Note: Test data from each mirror's production run sample included.